HARVARD
Materials Research Science and Engineering Center
 
 
 
Novel Laser Patterning of Silicon Surfaces
Friend and Mazur

Novel Laser Patterning of Silicon Surfaces

Friend and Mazur have collaborated to produce arrays of small-scale spikes on the surface of silicon by using femtosecond laser pulses to induce a chemical reaction in the presence of halogen containing compounds. An underlying mask, made from a TEM grid, produced very highly ordered spikes. These spikes are promising for use as field emitters, and this method offers a very simple way to controllably create such structures. In addition, they are also exploring possible routes to functionalize the surface spikes, further enhancing their utility.