Novel Laser Patterning of Silicon Surfaces

Friend and Mazur have collaborated to produce arrays of small-scale spikes on the surface of silicon by using femtosecond laser pulses to induce a chemical reaction in the presence of halogen containing compounds. An underlying mask, made from a TEM grid, produced very highly ordered spikes. These spikes are promising for use as field emitters, and this method offers a very simple way to controllably create such structures. In addition, they are also exploring possible routes to functionalize the surface spikes, further enhancing their utility.